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D6F-P
MEMS Flow Sensor
A Compact, High-accuracy Flow
Sensor with Superior Resistance
to Environments.
? Anti-dust performance is improved using the Cyclon method.
? A full lineup of models with different connector types: barb
joints, lead terminals for direct mounting on-board, and mani-
folds.
? High accuracy of ± 5% FS.
RoHS Compliant
Refer to the Safety Precautions on page 4.
Ordering Information
Model
D6F-P0001A1 (Lead terminals)
D6F-P0010A1 (Lead terminals)
D6F-P0010A2 (Connector)
D6F-P0010AM2
(Connector manifold mount)
D6F-CABLE2 (Optional)
(A2 and AM2)
Applicable fluid (See note 1.)
Air (See note 2.)
?
Flow rate range
0 to 0.1 L/min.
0 to 1 L/min.
?
25
25
25
25
25
Minimum order
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Output Voltage Characteristics
D6F-P0001A1
3.0
2.5
2.0
1.5
1.0
0.5
0.0
D6F-P0010A1/-P0010A2/-P0010AM2
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
0.0 8
0.10
0
0.25
0.5
0.75
1
Flo w rate (L/min)
Flo w rate (L/min)
Flow rate
L/min (normal)
Output voltage
V
0
0.50
± 0.10
0.02
0.90
± 0.10
0.04
1.30
± 0.10
0.06
1.70
± 0.10
0.08
2.10
± 0.10
0.10
2.50
± 0.10
Flow rate
L/min (normal)
Output voltage
V
0
0.50
± 0.10
0.25
1.60
± 0.10
0.50
2.10
± 0.10
0.75
2.31
± 0.10
1.00
2.50
± 0.10
Measurement conditions: Power supply voltage of 5.0 ± 0.1 VDC, ambient tem-
perature of 25 ± 5 ° C, and ambient humidity of 35% to 75%.
Measurement conditions: Power supply voltage of 5.0 ± 0.1 VDC, ambient tem-
perature of 25 ± 5 ° C, and ambient humidity of 35% to 75%.
1
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